Technical Tables for This Film Deposition under Vacuum Conditions

Isotopic Abundance & Mass (Accurate)

Isotope	Mass (amu)	Composition (atomic %)
H¹	1.007825	99.985
H²	2.0140	0.015
He³	3.01603	0.00014
He⁴	4.00260	99.99986
Li⁶	6.015121	7.5
Li⁷	7.016003	92.5
Be⁹	9.012182	100
B¹⁰	10.012937	19.8
B¹¹	11.009305	80.2
C¹²	12.000000	98.90
C¹³	13.003355	1.10
N¹⁴	14.003074	99.63
N¹⁵	15.000108	0.37
O¹⁶	15.994915	99.762
O¹⁷	16.999131	0.038
O¹⁸	17.999160	0.200
F¹⁹	18.998403	100
Ne²⁰	19.992435	90.51
Ne²¹	20.993843	0.27
Ne²²	21.991383	9.22
Na²³	22.989767	100
Mg²⁴	23.985042	78.99
Mg²⁵	24.985837	10.00
Mg²⁶	25.982593	11.01
Al²⁷	26.98154	100
Si²⁸	27.976927	92.23
Si²⁹	28.976495	4.67
Si³⁰	29.973770	3.10
P³¹	30.973762	100
S³²	31.972070	95.02
S³³	32.971456	0.75
S³⁴	33.967866	4.21
S³⁶	35.967080	0.02
Cl³⁵	34.968852	75.77
Cl³⁷	36.965903	24.23
Ar³⁶	35.967545	0.337
Ar³⁸	37.962732	0.063
Ar⁴⁰	39.962384	99.60
K³⁹	38.963707	93.2581
K⁴⁰	39.963999	0.0117
K⁴¹	40.961825	6.7302
Ca⁴⁰	39.962591	96.941
Ca⁴²	41.958618	0.647
Ca⁴³	42.958766	0.135
Ca⁴⁴	43.955480	2.086
Ca⁴⁶	45.953689	0.004
Ca⁴⁸	47.952533	0.187
Sc⁴⁵	44.955910	100
Ti⁴⁶	45.952629	8.0
Ti⁴⁷	46.951764	7.3
Ti⁴⁸	47.947947	73.8
Ti⁴⁹	48.947871	5.5
Ti⁵⁰	49.944792	5.4
V⁵⁰	49.947161	0.25
V⁵¹	50.943962	99.75
Cr⁵⁰	49.946046	4.35
Cr⁵²	51.940509	83.79
Cr⁵³	52.940651	9.50
Cr⁵⁴	53.938882	2.36
Mn⁵⁵	54.938047	100
Fe⁵⁴	53.939612	5.8
Fe⁵⁶	55.934939	91.72
Fe⁵⁷	56.935396	2.2
Fe⁵⁸	57.933277	0.28
Co⁵⁹	58.933198	100
Ni⁵⁸	57.935346	68.27
Ni⁶⁰	59.930788	26.10
Ni⁶¹	60.931058	1.13
Ni⁶²	61.928346	3.59
Ni⁶⁴	63.927968	0.91
Cu⁶³	62.939598	69.17
Cu⁶⁵	64.927793	30.83
Zn⁶⁴	63.929145	48.6
Zn⁶⁶	65.926034	27.9
Zn⁶⁷	66.927129	4.1
Zn⁶⁸	67.924846	18.8
Zn⁷⁰	69.925325	0.6
Ga⁶⁹	68.925580	60.1
Ga⁷¹	70.924700	39.9
Ge⁷⁰	69.924250	20.5
Ge⁷²	71.922079	27.4
Ge⁷³	72.923463	7.8
Ge⁷⁴	73.921177	36.5
Ge⁷⁶	75.921401	7.8
As⁷⁵	74.921594	100
Se⁷⁴	73.922475	0.9
Se⁷⁶	75.919212	9.0
Se⁷⁷	76.919912	7.6
Se⁷⁸	77.917304	23.5
Se⁸⁰	79.916520	49.6
Se⁸²	81.916698	9.4
Br⁷⁹	78.918336	50.69
Br⁸¹	80.916289	49.31
Kr⁷⁸	77.920397	0.35
Kr⁸⁰	79.916380	2.25
Kr⁸²	81.913482	11.6
Kr⁸³	82.914135	11.5
Kr⁸⁴	83.911507	57.0
Kr⁸⁶	85.910616	17.3
Rb⁸⁵	84.911794	72.17
Rb⁸⁷	86.909187	27.83
Sr⁸⁴	83.913430	0.56
Sr⁸⁶	85.909267	9.86
Sr⁸⁷	86.908884	7.00
Sr⁸⁸	87.905619	82.58
Y⁸⁹	88.905849	100
Zr⁹⁰	89.904703	51.45
Zr⁹¹	90.905644	11.27
Zr⁹²	91.905039	17.17
Zr⁹⁴	93.906314	17.33
Zr⁹⁶	95.908275	2.78
Nb⁹³	92.906377	100
Mo⁹²	91.906088	14.84
Mo⁹⁴	93.905085	9.25
Mo⁹⁵	94.905840	15.92
Mo⁹⁶	95.904678	16.68
Mo⁹⁷	96.906020	9.55
Mo⁹⁸	97.905406	24.13
Mo¹⁰⁰	99.907477	9.63
Tc	-	-
Ru⁹⁶	95.907599	5.52
Ru⁹⁸	97.905287	1.88
Ru⁹⁹	98.905939	12.7
Ru¹⁰⁰	99.904219	12.6
Ru¹⁰¹	100.905582	17.0
Ru¹⁰²	101.904348	31.6
Ru¹⁰⁴	103.905424	18.7
Rh¹⁰³	102.905500	100
Pd¹⁰²	101.905634	1.02
Pd¹⁰⁴	103.904029	11.14
Pd¹⁰⁵	104.905079	22.33
Pd¹⁰⁶	105.903478	27.33
Pd¹⁰⁸	107.903895	26.46
Pd¹¹⁰	109.905167	11.72
Ag¹⁰⁷	106.905092	51.84
Ag¹⁰⁹	108.904757	48.16
Cd¹⁰⁶	105.906461	1.25
Cd¹⁰⁸	107.904176	0.89
Cd¹¹⁰	109.903005	12.49
Cd¹¹¹	110.904182	12.80
Cd¹¹²	111.902758	24.13
Cd¹¹³	112.904400	12.22
Cd¹¹⁴	113.903357	28.73
Cd¹¹⁶	115.904754	7.49
In¹¹³	112.904061	4.3
In¹¹⁵	114.903880	95.7
Sn¹¹²	111.904826	1.0
Sn¹¹⁴	113.902784	0.7
Sn¹¹⁵	114.903348	0.4
Sn¹¹⁶	115.901747	14.7
Sn¹¹⁷	116.902956	7.7
Sn¹¹⁸	117.901609	24.3
Sn¹¹⁹	118.903310	8.6
Sn¹²⁰	119.902200	32.4
Sn¹²²	121.903440	4.6
Sn¹²⁴	123.905274	5.66
Sb¹²¹	120.903821	57.3
Sb¹²³	122.904216	42.7
Te¹²⁰	119.904048	0.096
Te¹²²	121.903054	2.60
Te¹²³	122.904271	0.908
Te¹²⁴	123.902823	4.816
Te¹²⁵	124.904433	7.14
Te¹²⁶	125.903314	18.95
Te¹²⁸	127.904463	31.69
Te¹³⁰	129.906229	33.80
I¹²⁷	126.904473	100
Xe¹²⁴	123.905894	0.10
Xe¹²⁶	125.904281	0.09
Xe¹²⁸	127.903531	1.91
Xe¹²⁹	128.904780	26.4
Xe¹³⁰	129.903509	4.1
Xe¹³¹	130.905072	21.2
Xe¹³²	131.904144	26.9
Xe¹³⁴	133.905395	10.4
Xe¹³⁶	135.907214	8.9
Cs¹³³	132.905429	100
Ba¹³⁰	129.906282	0.106
Ba¹³²	131.905042	0.101
Ba¹³⁴	133.904486	2.417
Ba¹³⁵	134.905665	6.592
Ba¹³⁶	135.904553	7.854
Ba¹³⁷	136.905812	11.23
Ba¹³⁸	137.905232	71.70
La¹³⁸	137.907105	0.09
La¹³⁹	138.906346	99.91
Ce¹³⁶	135.907140	0.19
Ce¹³⁸	137.905985	0.25
Ce¹⁴⁰	139.905433	88.48
Ce¹⁴²	141.909241	11.08
Pr¹⁴¹	140.907647	100
Nd¹⁴²	141.907719	27.13
Nd¹⁴³	142.909810	12.18
Nd¹⁴⁴	143.910083	23.80
Nd¹⁴⁵	144.912570	8.30
Nd¹⁴⁶	145.913113	17.19
Nd¹⁴⁸	147.916889	5.76
Nd¹⁵⁰	149.920887	5.64
Pm	-	-
Sm¹⁴⁴	143.911998	3.1
Sm¹⁴⁷	146.914895	15.0
Sm¹⁴⁸	147.914820	11.3
Sm¹⁴⁹	148.917181	13.8
Sm¹⁵⁰	149.917273	7.4
Sm¹⁵²	151.919729	26.7
Sm¹⁵⁴	153.922206	22.7
Eu¹⁵¹	150.919847	47.8
Eu¹⁵³	152.921225	52.2
Gd¹⁵²	151.919786	0.20
Gd¹⁵⁴	153.920861	2.18
Gd¹⁵⁵	154.922618	14.80
Gd¹⁵⁶	155.922118	20.47
Gd¹⁵⁷	156.923956	15.65
Gd¹⁵⁸	157.924099	24.84
Gd¹⁶⁰	159.927049	21.86
Tb¹⁵⁹	158.925342	100
Dy¹⁵⁶	155.925277	0.06
Dy¹⁵⁸	157.924403	0.10
Dy¹⁶⁰	159.925193	2.34
Dy¹⁶¹	160.926930	18.9
Dy¹⁶²	161.926795	25.5
Dy¹⁶³	162.928728	24.9
Dy¹⁶⁴	163.929171	28.2
Ho¹⁶⁵	164.930319	100
Er¹⁶²	161.928775	0.14
Er¹⁶⁴	163.929198	1.61
Er¹⁶⁶	165.930290	33.6
Er¹⁶⁷	166.932046	22.95
Er¹⁶⁸	167.932368	26.8
Er¹⁷⁰	169.935461	14.9
Tm¹⁶⁹	168.934212	100
Yb¹⁶⁸	167.933894	0.13
Yb¹⁷⁰	169.934759	3.05
Yb¹⁷¹	170.936323	14.3
Yb¹⁷²	171.936378	21.9
Yb¹⁷³	172.938208	16.12
Yb¹⁷⁴	173.938859	31.8
Yb¹⁷⁶	175.942564	12.7
Lu¹⁷⁵	174.940770	97.41
Lu¹⁷⁶	175.942679	2.59
Hf¹⁷⁴	173.940044	0.16
Hf¹⁷⁶	175.941406	5.2
Hf¹⁷⁷	176.943217	18.6
Hf¹⁷⁸	177.943696	27.1
Hf¹⁷⁹	178.945812	13.74
Hf¹⁸⁰	179.946545	35.2
Ta¹⁸⁰	179.947462	0.012
Ta¹⁸¹	180.947992	99.988
W¹⁸⁰	179.946701	0.13
W¹⁸²	181.948202	26.3
W¹⁸³	182.950220	14.3
W¹⁸⁴	183.950928	30.67
W¹⁸⁶	185.954357	28.6
Re¹⁸⁵	184.952951	37.40
Re¹⁸⁷	186.955744	62.6
Os¹⁸⁴	183.952488	0.02
Os¹⁸⁶	185.953830	1.58
Os¹⁸⁷	186.955741	1.6
Os¹⁸⁸	187.955860	13.3
Os¹⁸⁹	188.958137	16.1
Os¹⁹⁰	189.958436	26.4
Os¹⁹²	191.961467	41.0
Ir¹⁹¹	190.960584	37.3
Ir¹⁹³	192.962917	62.7
Pt¹⁹⁰	189.959917	0.01
Pt¹⁹²	191.961019	0.79
Pt¹⁹⁴	193.962655	32.9
Pt¹⁹⁵	194.964766	33.8
Pt¹⁹⁶	195.964926	25.3
Pt¹⁹⁸	197.967869	7.2
Au¹⁹⁷	196.966543	100
Hg¹⁹⁶	195.965807	0.15
Hg¹⁹⁸	197.966743	10.1
Hg¹⁹⁹	198.968254	17
Hg²⁰⁰	199.968300	23.1
Hg²⁰¹	200.970277	13.2
Hg²⁰²	201.970617	29.65
Hg²⁰⁴	203.973467	6.8
Tl²⁰³	202.972320	29.524
Tl²⁰⁵	204.974401	70.476
Pb²⁰⁴	203.973020	1.4
Pb²⁰⁶	205.974440	24.1
Pb²⁰⁷	206.975872	22.1
Pb²⁰⁸	207.976627	52.4
Bi²⁰⁹	208.980374	100
Po	-	-
At	-	-
Rn	-	-
Fr	-	-
Ra	-	-
Ac	-	-
Th²³²	232.038054	100
Pa	-	-
U²³⁴	234.040946	0.0055
U²³⁵	235.043924	0.720
U²³⁸	238.050784	99.2745
Data reprinted from CRC Handbook of Chemistry and Physics, 69th ed., 1988-89. Boca Raton, Fl: CRC Press, Inc. & De Blevre, P, Barnes, IL: Intl. J. of Mass Spectrometry and Ion Processes. 1985; 65:211- 230.