Jump to a graph (58Kb) of Detection Limits vs. Probe Size for analytical techniques.
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| Analytical Technique | Typical Applications | Signal Detected | Elements Detected | Organic Information | Detection Limits | Depth Resolution | Imaging/ Mapping | Lateral Resolution (Probe Size) |
|---|---|---|---|---|---|---|---|---|
| Auger | Surface analysis and high resolution depth profiling | Auger electrons from near-surface atoms | Li - U | -- | 0.1 - 1 at% | <2 nm | Yes | 100 nm |
| FE Auger | Surface analysis, microanalysis, microarea depth profiling | Auger electrons from near-surface atoms | Li - U | -- | 0.01 - 1 at% | 2 - 6 nm | Yes | <15 nm |
| AFM/STM | Surface imaging with near atomic resolution | Atomic scale roughness | -- | -- | -- | 0.01 nm | Yes | 5 nm |
| Analytical Technique | Typical Applications | Signal Detected | Elements Detected | Organic Information | Detection Limits | Depth Resolution | Imaging/ Mapping | Lateral Resolution (Probe Size) |
|---|---|---|---|---|---|---|---|---|
| micro-FTIR | Identification of polymers, plastics, organic films, fibers, and liquids | Infrared absorption | H - U | Molecular groups | 0.1 - 100 ppm | -- | No | 5 microns |
| TXRF | Metallic contamination on semiconductor wafers | Fluorescent X-rays | S - U | -- | 8e9-1e12 at/cm2 | 5 nm | Yes | 10 mm |
| XPS/ESCA | Surface analysis of organic and inorganic molecules | Photoelectrons | Li - U | Chemical bonding | 0.01 - 1 at% | 1 - 10 nm | Yes | 75 microns - 2 mm |
| Analytical Technique | Typical Applications | Signal Detected | Elements Detected | Organic Information | Detection Limits | Depth Resolution | Imaging/ Mapping | Lateral Resolution (Probe Size) |
|---|---|---|---|---|---|---|---|---|
| HFS | Hydrogen in thin films (Quantitative) | Forward scattered hydrogen atoms | H, D | -- | 0.01 at% | 50 nm | No | 2 mm x 10 mm |
| RBS | Quantitative thin film composition and thickness | Backscattered He atoms | Li - U | -- | 1 - 10 at% (Z<20) 0.01-1 at% (20<Z<70) 0.01-0.001 at% (Z>70) |
2 - 20 nm | Yes | 2 mm |
| Analytical Technique | Typical Applications | Signal Detected | Elements Detected | Organic Information | Detection Limits | Depth Resolution | Imaging/ Mapping | Lateral Resolution (Probe Size) |
|---|---|---|---|---|---|---|---|---|
| SEM/EDS | Imaging and elemental microanalysis | Secondary and backscattered electrons and X-rays | B - U | -- | 0.1 - 1 at% | 1 - 5 micron (EDS) | Yes | 4.5 nm (SEM) 1 micron (EDS) |
| FE SEM | High resolution imaging of polished precision cross sections | Secondary and backscattered electrons | -- | -- | -- | -- | Yes | 1.5 nm |
| FE SEM (in lens) | Ultra-high resolution imaging with unique contrast mechanism | Secondary and backscattered electrons | -- | -- | -- | -- | Yes | 0.7 nm |
| Analytical Technique | Typical Applications | Signal Detected | Elements Detected | Organic Information | Detection Limits | Depth Resolution | Imaging/ Mapping | Lateral Resolution (Probe Size) |
|---|---|---|---|---|---|---|---|---|
| SIMS | Dopant and impurity depth profiling, surface, and microanalysis | Secondary ions | H - U | -- | 1e12 - 1e16 at/cm3 (ppb-ppm) | 5 - 30 nm | Yes | 1 micron (Imaging), 30 micron (Depth profiling) |
| Quad SIMS | Dopant and impurity depth profiling, surface, and microanalysis, insulators | Secondary ions | H - U | -- | 1e14 - 1e17 at/cm3 | <5 nm | Yes | <5 micron (Imaging), 30 micron (Depth profiling) |
| TOF SIMS (Static SIMS) | Surface microanalysis of polymers, plastics, and organics | Secondary ions, atoms, molecules | H - U | Molecular ions to mass 10,000 | <1 ppma, 1e9 at/cm2 | 1 monolayer, 5 nm (Depth profile) | Yes | 0.15 micron |
| MALDI | Protein, peptide, and polymer molecular weight distribution | Large molecular ions | -- | Molecular ions to mass 500,000 | low femtomole to picomole | -- | No | 50 micron |
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